back end of line metal first - SERP Analysis

https://en.wikipedia.org/wiki/Back_end_of_line

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https://semiengineering.com/knowledge_centers/manufacturing/process/beol/

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https://www.semiconductor-digest.com/semi-damascene-metallization-inflection-point-in-back-end-of-line-processing/

https://www.researchgate.net/figure/Back-end-of-line-BEOL-interconnect-and-the-challenge-for-metal-patterning-a-SEM_fig2_348149468

https://m.youtube.com/watch?v=e34O6E2VfpA

https://semiengineering.com/back-end-of-line-beol-metallization/

https://patents.google.com/patent/US20140231998A1/en

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https://en.wikipedia.org/wiki/Semiconductor_device_fabrication

https://www.chiphistory.org/35-beol-origins-the-chip-history-center

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https://www.youtube.com/watch?v=dfxDakaX1WA

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https://www.usjpc.com/en/column/

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https://research.ibm.com/blog/beol-cu-interconnects-iedm

https://www.matsusada.com/column/sc_mfg_proces-back-end.html

https://www.hpcwire.com/off-the-wire/imec-to-demonstrate-2-metal-layer-back-end-of-line-for-the-3nm-technology-node/

https://community.cadence.com/cadence_blogs_8/b/breakfast-bytes/posts/iedm-coventor-panel

https://techovedas.com/what-is-front-endfeol-middle-end-and-back-end-of-linebeol-in-semiconductor-manufacturing/

https://patents.google.com/patent/US20170140986A1/en

https://www.researchgate.net/figure/Back-end-of-line-cross-section-and-related-process-scheme-The-actual-BEOL-process_fig3_363071654

https://pubs.aip.org/avs/jvb/article/37/6/061204/103378/Low-temperature-back-end-of-line-technology

https://www.quora.com/What-are-front-end-and-back-end-processes-in-semiconductor-manufacturing

https://github.com/gc-na/gc-na.github.io/blob/master//wiki/back-end-of-line-beol_english.md

https://www.youtube.com/watch?v=saIOqXIUMXg&pp=ygUMI3Zsc2lwcm9jZXNz

https://www.appliedmaterials.com/us/en/glossary.html

https://www.edaboard.com/threads/whats-the-meaning-of-wat-beol-and-amp.35036/

https://www.youtube.com/watch?v=JoNpg5g3Hkc

https://electronics.stackexchange.com/questions/30514/what-back-end-and-front-end-are-in-hardware-design

https://www.lamresearch.com/technical-glossary/

https://pubs.acs.org/doi/10.1021/acs.nanolett.3c04833

https://archive.nptel.ac.in/content/storage2/courses/103106075/Courses/Lecture1.html

https://www.synopsys.com/content/dam/synopsys/implementation&signoff/electrical-layout-verification-documents/ieee-2017-paper.pdf

https://www.mdpi.com/2072-666X/16/2/121

https://fessgroup.co.uk/insight/whats-the-difference-between-feol-and-beol-processes/

https://www.youtube.com/watch?v=pIWGCg4na0g

https://www.osti.gov/servlets/purl/1141369

https://indico.cern.ch/event/48132/attachments/956631/1357652/Faccio_ESEsem_ULSI.pdf

https://imapsjmep.org/api/v1/articles/39860-redistribution-layers-rdls-for-2-5d-3d-ic-integration.pdf

https://spie.org/AL/course/lithography-integration-for-semiconductor-feol-beol-fabrication

https://ieeexplore.ieee.org/iel7/55/4357973/10050514.pdf

https://www.a-m-c.com/experience/industries/semiconductor/back-end-semiconductor-manufacturing/

https://pubs.aip.org/aip/apl/article/123/3/030401/2902888/Guest-Editorial-Dimensional-Scaling-of-Material

https://www.mdpi.com/2079-9292/12/21/4403

https://www.sciencedirect.com/science/article/abs/pii/S0167931725000140

https://news.skhynix.com/semiconductor-front-end-process-episode-4/

https://www.st.com/resource/en/application_note/cd00003986-introduction-to-semiconductor-technology-stmicroelectronics.pdf

https://siliconsemiconductor.net/article/115049/Imec_produces_the_first_fully_self-aligned_two-metal-level_semi-damascene_module

https://www.mckinsey.com/industries/semiconductors/our-insights/advanced-chip-packaging-how-manufacturers-can-play-to-win

https://www.weebit-nano.com/definition/feol-front-end-of-line-memory/

https://www.nxp.com/docs/en/supporting-information/DWF13_AMF_ENT_T0194.pdf

https://github.com/patrick-kidger/diffrax/issues/279

https://onlinelibrary.wiley.com/doi/full/10.1002/advs.202207321

https://pmc.ncbi.nlm.nih.gov/articles/PMC10870778/

https://www.nature.com/articles/s41598-022-23951-x

https://www.youtube.com/watch?v=Ykkk_gphSCM

https://semianalysis.com/2024/02/09/hybrid-bonding-process-flow-advanced/

https://www.enas.fraunhofer.de/content/dam/enas/Dokumente/English/Downloads/Brochures/BEOL_english_web.pdf

https://www.lincotec.com/en/about/index.php?kind=183

https://patents.justia.com/patent/11270991

https://gyulab.github.io/backendprocess/

https://users.ece.utexas.edu/~athomsen/cmos_processing.pdf

https://www.kth.se/social/upload/5119e9f6f27654688982e016/Lecture%2010%20and%2011.pdf

https://imapsource.org/api/v1/articles/56477-chip-package-interaction-understanding-of-contributing-factors-in-back-end-of-line-beol-silicon-cu-pillar-design-and-applied-process-improvements.pdf

https://www.iue.tuwien.ac.at/phd/papaleo/Mainch1.html

https://www.asml.com/news/stories/2021/semiconductor-manufacturing-process-steps

https://www.freepatentsonline.com/8937009.html

https://www.chu.berkeley.edu/wp-content/uploads/2020/01/Chenming-Hu_ch3.pdf

https://www.semiconductors.org/semiconductors-101/frequently-asked-questions/

https://www.semiconductor-today.com/features/PDF/semiconductor-today-november-december-2021-Logic-technology.pdf

https://ieeexplore.ieee.org/iel8/6287639/10820123/10966879.pdf

https://pdfs.semanticscholar.org/d109/b45b5cc913b0aa3b489923e37f8acd1a81a1.pdf

https://www.anandtech.com/show/8223/an-introduction-to-semiconductor-physics-technology-and-industry/3

https://arxiv.org/pdf/2108.10941

https://globalsmtasia.com/new-beolmol-breakthroughs/

https://www.techinsights.com/blog/trip-down-tsmc-memory-lane-part-2

http://web.cecs.pdx.edu/~jmorris/ece_416_&_516_IC_Technologies/Lecture%2016%20Back-end%20&%20Manufacturing.pdf

https://patents.justia.com/patent/8932956

https://medium.com/%40sunyli2022/levels-and-steps-of-integration-76d2181da643

https://www.linx-consulting.com/wp-content/uploads/2018/04/01-07-K_Boyd-GF-Improving_BEOL_for_sub-10nm_nodes.pdf

https://gtcad.gatech.edu/www/papers/gtcad-jetcas22-a.pdf

https://www.semi-cera.com/news/front-end-of-line-feol-laying-the-foundation/

https://www.wipo.int/edocs/plrdocs/en/lexinnova_plr_finfet.pdf

https://www.azom.com/article.aspx?ArticleID=22948

https://www.edaboard.com/threads/metal-layer-and-base-layer.184087/

https://medium.com/%40michlimlim/stop-just-using-frontend-or-backend-to-describe-the-engineering-you-like-e8c392956ada

https://link.springer.com/chapter/10.1007/978-1-4615-0461-0_2

https://www.mlb.com/orioles/ballpark/information/guide

https://www.freepatentsonline.com/8932956.html